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ternationalWorkshoponEUVSource2016,Dublin,Ireland,2016Nov13-15.

[35]PlatonovY.Intl.WorkshoponEUVSource2016,P31,Dublin,Ireland,2016,Nov13-15.

[36]BenschopJ.Proceedingsofthe2016InternationalWorkshoponEUVL,Maui,HI,2016.

[37]SasakiA,NishiharaK,andSunaharaAetal..Theoreticalinvestigationofthespectrumandconversionefciencyofshortwavelengthextreme-ultravioletlightsourcesbasedonterbiumplasmas[J].Appl.Phys.Lett.2016,97,231501.

[38]CarrollPKandO'SullivanG.Ground-stateconfigurationsofionicspeciesIthroughXVIforZ等于57-74andtheinterpretationof4d-4femissionresonancesinlaser-producedplasmas[J].Phys.Rev.A.1982,25:275-86.

[39]GwynCW,StulenR,SweeneyDetal..Extremeultravioletlithography[J].Vac.Sci.Technol.B,1998,16,3142.

[40]FujiokaS,NishimuraH,andNishiharaKetal..OpacityEffectonExtremeUltravioletRadiationfromLaser-ProducedTinPlasmas[J].Phys.Rev.Lett.2005,95:235004.

[41]TanakaH,MatsumotoA,AkinagaKetal..ComparativestudyonemissioncharacteristicsofextremeultravioletradiationfromCO2andNd:YAGlaser-producedtinplasmas[J].Appl.Phys.Lett.2005,87,041503.


这篇论文出处:http://www.sxsky.net/xie/070106398.html

[42]HaydenP,CummingsA,MurphyNetal..13.5nmextremeultravioletemissionfromtinbasedlaserproducedplasmasources[J].J.Appl.Phys.2006,99,093302.

[43]FujiokaS,ShimomuraM,ShimadaYetal..Pure-tinmicrodropletsirradiatedwithdoublelaserpulsesforefficientandminimum-massextreme-ultravioletlightsourceproduction.Appl.Phys.Lett.2016,92,241502.

[44]OtsukaT,KilbaneD,andWhiteJetal..Rare-earthplasmaextremeultravioletsourcesat6.5–6.7nm[J].Appl.Phys.Lett.2016,97,111503.

[45]CumminsT,OtsukaT,YugamiN,etal..OptimizingConversionEfficiencyandReducingIonEnergyinaLaser-producedGdPlasma[J].Appl.Phys.Lett.2016,100,06118.

[46]OtsukaT,KilbaneD,HigashiguchiT,etal..SystematicInvestigationofSelf-absorptionandConversionEfficiencyof6.7nmExtremeultravioletSources[J].Appl.Phys.Lett.2016,97,231503.

[47]HigashiguchiT,OtsukaT,YugamiN,etal..ExtremeUltravioletSourceat6.7nmBasedonaLow-densityPlasma[J].Appl.Phys.Lett.2016,99,191502.

[48]WhiteJ,DunneP,HaydenPetal..Optimizing13.5nmlaser-producedtinplasmaemissionasafunctionoflaserwavelength[J].Appl.Phys.Lett.2007,90,181502.

[49]ColombantDandTononG.F.X-rayEmissioninLaser-producedPlasmas[J].J.Appl.Phys.1973,44,3524.

[50]LinJQandToshihisaT.Supplyofaparticle-includeddropletaslaserplasmatargetforextremeultravioleemission[J].J.Phys.D.Appl.Phys.2016,42,045204.

[51]LinJQandToshihisaT,EnhancementofEUVemissionintensityfromparticlesinadropletbyexplodingthedroplet[J].J.Phys.D.Appl.Phys.2016,42:155203-155207.

[52]SunYB,LinJQ,GaoXetal..Characteristicsofiondebrisfromlaser-producedtinplasmaandmitigationofenergeticionsbyambientgas[J].SciChina-PhysMechAstron,2016,55:392-395.

[53]LinJQ,WeberN,MaulJetal..At-wavelengthinspectionofsub-40nmdefectsinextremeultravioletlithographymaskblankbyphotoemissionelectronmicroscopy[J].OpticsLetters.2007,32(13):1875-1877

[54]LinJQ,WeberN,EscheMetal..Three-dimensionalcharacterizationofextremeultravioletmaskblankdefectsbyinterferencecontrastphotoemissionelectronmicroscopy[J].OpticsExpress.2016,16(20):15343-15352.

[55]TaoHY,LinJQ,HaoZQ,etal..FormationofStrongLight-trappingNano-andMicroscaleStructuresonaSphericalMetalSurfacebyFemtosecondLaserFilament[J].Appl.Phys.Lett.2016,100:201611.

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有关论文范文主题研究: 光刻相关论文范文 大学生适用: 学术论文、函授论文
相关参考文献下载数量: 83 写作解决问题: 怎么撰写
毕业论文开题报告: 文献综述、论文题目 职称论文适用: 期刊发表、中级职称
所属大学生专业类别: 怎么撰写 论文题目推荐度: 优秀选题

[56]AlshershbyM,LinJQandHaoZQ.Numericalanalysisofguidingamicrowaveradiationusingasetofplasmalaments:dielectricwaveguideconcept[J].J.Phys.D:Appl.Phys.2016,45:065102.

[57]AlshershbyM,HaoZQandLinJQ.Guidingmicrowaveradiationusinglaser-inducedFilaments:thehollowconductingwaveguideconcept[J].J.Phys.D:Appl.Phys.2016,45:265401.

[58]NakimanaA,HaoZQ,LiuJ,etal..TheHighDependenceofPolarizationResolvedLaser-inducedBreakdownSpectroscopyonExperimentalConditions[J].Chin.Phys.B,2016,21(7):074204.

基金项目研究成果(发表的文章,专利等)

[1]LinJQandTOSHIHISAT,EnhancementofEUVEmissionIntensityFromParticlesinaDropletbyExplodingtheDroplet[J].J.Phys.D.Appl.Phys.2016,42:155203-155207.

[2]SunYB,LinJQ,GaoXetal..CharacteristicsofIonDebrisFromLaser-producedTinPlasmaandMitigationofEnergeticIonsbyAmbientGas[J].SciChina-PhysMechAstron,2016,55

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